منابع مشابه
Nuclear Resonant Surface Diffraction of Synchrotron Radiation.
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Deep X-ray lithography using synchrotron radiation with a characteristic wavelength of about 1 3 A is a powerful tool to generate threedimensional microstructures in thick layers of polymeric resists. Resist reliefs produced in this way are used in the framework of the so called LIGA process, as precise templates to generate microdevices from metals, plastics, ceramic materials, and glasses. A ...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1989
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.55.1360